Surface and Interface Structures of Ultra-Thin Thermal Oxides on Si(100)

Masaaki Fujimura; Tomoyuki Yagi; Masatoshi Ohashi; Takeo Hattori

doi:https://doi.org/10.7567/SSDM.1997.D-12-5

1997 International Conference on Solid State Devices and Materials

Sep 16, 1997 - Sep 19, 1997
ACT CITY Hamamatsu, Hamamatsu, Japan

[D-12-5] Surface and Interface Structures of Ultra-Thin Thermal Oxides on Si(100)

Masaaki Fujimura, Tomoyuki Yagi, Masatoshi Ohashi, Takeo Hattori (1.Department of Electrical and Electronic Engineering, Musashi Institute of Technology)

https://doi.org/10.7567/SSDM.1997.D-12-5

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