[D-13-3] Amorphous Silicon Avalanche Photodiode Films Using Functionally Graded Superlattice Structure

Kazuaki Sawada、Yoshihiro Okumura、Yoshinori Hatanaka、Takao Ando (1.Research Institute of Electronics, Shizuoka University)

https://doi.org/10.7567/SSDM.1997.D-13-3