[D-2-1] Defect-Controlled Selective Epitaxial Growth of GaP on Si by Migration-Enhanced Epitaxy under Atomic Hydrogen Irradiation

Takuto Tsuji, Hiroo Yonezu, Mikihiro Yokozeki, Yasufumi Takagi, Naoki Ohshima (1.Department of Electrical and Electronic Engineering, Toyohashi University of Technology)

https://doi.org/10.7567/SSDM.1997.D-2-1