[D-2-3] Atomic Force Microscope Study of Two-Dimensional Dopant Delineation by Selective Chemical Etching

Kwang-Ki Choi, Tae-Yeon Seong, Dong-Ho Lee, Yong Sun Shon, Chung Tae Kim (1.Department of Materials Science and Engineering, Kwangju Institute of Science and Technology (K-JIST), 2.Memory R&D Division, Hyundai Electronics Co., Ltd.)

https://doi.org/10.7567/SSDM.1997.D-2-3