[D-2-3] Atomic Force Microscope Study of Two-Dimensional Dopant Delineation by Selective Chemical Etching

Kwang-Ki Choi、Tae-Yeon Seong、Dong-Ho Lee、Yong Sun Shon、Chung Tae Kim (1.Department of Materials Science and Engineering, Kwangju Institute of Science and Technology (K-JIST)、2.Memory R&D Division, Hyundai Electronics Co., Ltd.)

https://doi.org/10.7567/SSDM.1997.D-2-3