[D-3-1] UHV-STM Nanofabrication and Semiconductor Interface Characterization: Transitions to CMOS Technology

J. W. Lyding, K. Hess, G. C. Abeln, E. T. Foley, J. Lee, Z. Chen, I. C. Kizilyalli, Ph. Avouris (1.Department of Electrical and Computer Engineering and Beckman Institute for Advanced Science and Technology, University of Illinois, 2.Lucent Technologies, Bell Laboratories, 3.IBM Research Division, T. J. Watson Research Center)

https://doi.org/10.7567/SSDM.1997.D-3-1