[D-5-6] Transport Anisotropy of Si Delta-Doped Layer in InP Grown by OMVPE

Michihiko Suhara, Ken Sato, Hidetaka Honji, Hifumi Nakamura, Yasuyuki Miyamoto, Kazuhito Furuya (1.Research Center for Quantum Effect Electronics, Tokyo Institute of Technology, 2.Department of Electrical and Electronic Engineering, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1997.D-5-6