[D-6-5] Sub-Micron Tungsten Carbide/Amorphous Carbon Stacked Diode Fabricated by Ion- and Electron-Beam-Induced Deposition Technique

Naruhisa Miura、Tetsuyuki Numaguchi、Akira Yamada、Makoto Konagai (1.Department of Electrical and Electronic Engineering, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1997.D-6-5