[D-8-3] Characterization of Phosphorus Pile-Up at the SiO2/Si Interface

Yusuke Yoshimura, Kanta Ono, Hiroshi Fujioka, Yoshiyuki Sato, Satoshi Maeyama, Yuji. Baba, Kenji Yoshii, Teikichi A. Sasaki, Masaharu Oshima (1.Department of Applied Chemistry, The University of Tokyo, 2.NTT Laboratories, 3.Japan Atomic Energy Research Institute)

https://doi.org/10.7567/SSDM.1997.D-8-3