[D-8-3] Characterization of Phosphorus Pile-Up at the SiO2/Si Interface

Yusuke Yoshimura、Kanta Ono、Hiroshi Fujioka、Yoshiyuki Sato、Satoshi Maeyama、Yuji. Baba、Kenji Yoshii、Teikichi A. Sasaki、Masaharu Oshima (1.Department of Applied Chemistry, The University of Tokyo、2.NTT Laboratories、3.Japan Atomic Energy Research Institute)

https://doi.org/10.7567/SSDM.1997.D-8-3