[D-9-7] Electrical and Microstructural Analyses on Pd/Ge-Based Ohmic Contact to n-InGaAs

Il-Ho Kim、Sung Ho Park、Jwayeon Kim、Jong-Min Lee、Tae-Woo Lee、Moon Pyung Park (1.Semiconductor Div., Electronics and Telecommunications Research Institute、2.Dept. of Materials Engineering, Hoseo University)

https://doi.org/10.7567/SSDM.1997.D-9-7