[D-9-7] Electrical and Microstructural Analyses on Pd/Ge-Based Ohmic Contact to n-InGaAs

Il-Ho Kim, Sung Ho Park, Jwayeon Kim, Jong-Min Lee, Tae-Woo Lee, Moon Pyung Park (1.Semiconductor Div., Electronics and Telecommunications Research Institute, 2.Dept. of Materials Engineering, Hoseo University)

https://doi.org/10.7567/SSDM.1997.D-9-7