[D-9-8] Performance and Stability of MOVPE-Grown Carbon-Doped InP/InGaAs HBT's De-Hydrogenated by an Anneal After Emitter Mesa Formation

Kenji Kurishima, Shoji Yamahata, Hiroki Nakajima, Hiroshi Ito (1.NTT System Electronics Laboratories)

https://doi.org/10.7567/SSDM.1997.D-9-8