[A-1-6] Quantitative Evaluation of Dopant Loss in Low Energy As Implantation for Low-Resistive, Ultra Shallow Source/Drain Formation

M. Koh, K. Egusa, H. Furumoto, K. Shibahara, S. Yokoyama, M. Hirose (1.RCNS, Hiroshima University)

https://doi.org/10.7567/SSDM.1998.A-1-6