[A-1-6] Quantitative Evaluation of Dopant Loss in Low Energy As Implantation for Low-Resistive, Ultra Shallow Source/Drain Formation

M. Koh、K. Egusa、H. Furumoto、K. Shibahara、S. Yokoyama、M. Hirose (1.RCNS, Hiroshima University)

https://doi.org/10.7567/SSDM.1998.A-1-6