[A-10-4] Wafer-Scale Self-Organization of Periodic Step/Terrace Structure on Hydrogen-Terminated Si Surface

H. Sakaue、T. Tanaka、S. Fujiwara、S. Shingubara、T. Takahagi (1.Dept. of Electrical Eng., Hiroshima Univ.)

https://doi.org/10.7567/SSDM.1998.A-10-4