The Japan Society of Applied Physics

[A-3-3] Dual Gate Oxide Process Integration for High Performance Embedded Memory Products

Hideo Oi, Yasuhito Shiho, Peter Chen, Navakant Bhat (1.Consumer Systems Group and Networking & Computing Systems Group, Semiconductor Products Sector, MOTOROLA Inc.)

https://doi.org/10.7567/SSDM.1998.A-3-3