[A-5-1] Influences of Impurities on Oxidation Processes of Si(100) Substrates

Hiroya Ikeda、Yasuyuki Nakagawa、Kenji Sato、Shigeaki Zaima、Yukio Yasuda (1.Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University、2.Center for Cooperative Research Advanced Science and Technology, Nagoya University)

https://doi.org/10.7567/SSDM.1998.A-5-1