[A-7-1] Salicide Technologies for Deep-Sub-Micron-CMOS

Jorge A. Kittl、Michael A. Gribelyuk、Donald Miles、Chih-Ping Chao、Mark Rodder、Qi-Zhong Hong、Hong Yang、Sunil Hattangady、Ning Yu (1.Silicon Technology Development, Texas Instruments Inc.)

https://doi.org/10.7567/SSDM.1998.A-7-1