[A-7-1] Salicide Technologies for Deep-Sub-Micron-CMOS

Jorge A. Kittl, Michael A. Gribelyuk, Donald Miles, Chih-Ping Chao, Mark Rodder, Qi-Zhong Hong, Hong Yang, Sunil Hattangady, Ning Yu (1.Silicon Technology Development, Texas Instruments Inc.)

https://doi.org/10.7567/SSDM.1998.A-7-1