[A-7-6] Multilevel Aluminum Dual-Damascene Interconnects (Al-DDI) for Process-Step Reduction in 0.18um-ULSIs

Kazutoshi Shiba, Hitoshi Wakabayashi, Toshiyuki Takewaki, Kuniko Kikuta, Akira Kubo, Shinya Yamasaki, Yoshihiro Hayashi (1.Silicon Systems Research Laboratories and ULSI Device Development Laboratories, NEC Corporation)

https://doi.org/10.7567/SSDM.1998.A-7-6