[A-7-6] Multilevel Aluminum Dual-Damascene Interconnects (Al-DDI) for Process-Step Reduction in 0.18um-ULSIs
Kazutoshi Shiba, Hitoshi Wakabayashi, Toshiyuki Takewaki, Kuniko Kikuta, Akira Kubo, Shinya Yamasaki, Yoshihiro Hayashi
(1.Silicon Systems Research Laboratories and ULSI Device Development Laboratories, NEC Corporation)
https://doi.org/10.7567/SSDM.1998.A-7-6