[A-8-1] On Shallow Trench Isolation for Deep Submission CMOS Technologies

Amitava Chatterjee、M. Nandakumar、Stan Ashburn、Vikas Gupta、Siang P. Kwok、Ih-Chin Chen (1.Silicon Technology Development, Texas Instruments)

https://doi.org/10.7567/SSDM.1998.A-8-1