[B-10-4] A Precise SOI Film Thickness Measurement Including Gate Depletion and Quantum Effects

Kensuke Yamaguchi、Hideaki Onishi、Kiyotaka Imai、Shigetaka Kumashiro、Tadahiko Horiuchi (1.ULSI Device Development Laboratories, NEC Corporation)

https://doi.org/10.7567/SSDM.1998.B-10-4