[B-2-5] Conformal Step Coverage of (Ba, Sr)TiO3 Films Prepared by Liquid Source CVD Using Ti(t-BuO)2(DPM)2

Takaaki Kawahara, Shigeru Matsuno, Mikio Yamamuka, Masayoshi Tarutani, Takehiko Sato, Tsuyoshi Horikawa, Fusaoki Uchikawa, Kouichi Ono (1.Advance Technology R & D Center, Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1998.B-2-5