[B-6-5] Defect Engineering in Epitaxial Layers over Porous Silicon for ELTRAN SOI Wafers

Nobuhiko SATO, Shigeaki ISHII, Satoshi MATSUMURA, Masataka ITO, Jun NAKAYAMA, Takao YONEHARA (1.ELTRAN project, Canon Inc.)

https://doi.org/10.7567/SSDM.1998.B-6-5