The Japan Society of Applied Physics

[B-8-1] Analysies of the Radiation Caused Characteristics Change in SOI MOSFETS Using Field Shield Isolation

Y. Hirano、S. Maeda、W. Fernandez、T. Iwamatsu、Y. Yamaguchi、S. Maegawa、T. Nishimura (1.ULSI Development Center, Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1998.B-8-1