[B-9-2] Performance and Reliability Improvement of Polycrystalline Silicon Thin Film Transistors by Deuterium Plasma Passivation

Darren. C. Chen, C. Y. Lu, Steve S. Chung, C. F. Yeh (1.Department of Electronic Engineering, National Chiao Tung University)

https://doi.org/10.7567/SSDM.1998.B-9-2