[C-10-5] Highly Improved Electrical Properties of Diamond MISFET Prepared by Ultrahigh-Vacuum Process

Young Yun、Tetsuro Maki、Hiroyuki Tanaka、Takeshi Kobayashi (1.Department of Electrical Engineering, Faculty of Engineering Science, Osaka University)

https://doi.org/10.7567/SSDM.1998.C-10-5