[C-3-2] Silicon Nano-Crystal Memory with Tunneling Nitride

Ilgweon Kim, Hyungsik Kim, Jongho Lee, Hyungcheol Shin (1.Department of Electrical Engineering, KAIST, 2.LG Semicon Co., Ltd, 3.School of Electrical Engineering, Wonkwang University)

https://doi.org/10.7567/SSDM.1998.C-3-2