[D-6-3] Stress-Induced Leakage Current and Lateral Non-Uniform Charge Generation In Thermal Oxides Subjected to Negative-Gate-Voltage Impulse Stressing

Wai-Kin CHIM、Peng-Soon LIM (1.Centre for Integrated Circuit Failure Analysis and Reliability, Faculty of Engineering National University of Singapore)

https://doi.org/10.7567/SSDM.1998.D-6-3