[A-15-2] Low Temperature Recovery of Ru/(Ba, Sr)TiO3/Ru Capacitors Degraded by Forming Gas Annealing

T. Iizuka, K. Arita, I. Yamamoto, S. Yamamichi, H. Yamaguchi, T. Matsuki, S. Sone, H. Yabuta, Y. Miyasaka, Y. Kato (1.ULSI Device Development Lab., NEC Corporation, 2.Functional Materials Research Labs., NEC Corporation)

https://doi.org/10.7567/SSDM.1999.A-15-2