[A-15-2] Low Temperature Recovery of Ru/(Ba, Sr)TiO3/Ru Capacitors Degraded by Forming Gas Annealing

T. Iizuka、K. Arita、I. Yamamoto、S. Yamamichi、H. Yamaguchi、T. Matsuki、S. Sone、H. Yabuta、Y. Miyasaka、Y. Kato (1.ULSI Device Development Lab., NEC Corporation、2.Functional Materials Research Labs., NEC Corporation)

https://doi.org/10.7567/SSDM.1999.A-15-2