[A-15-3] Enhanced Recovery from Back-End Process Damage by Conductive Perovskite Electrode for BST Capacitor

Y. Fukuzumi, K. Natori, M. Izuha, K. Eguchi, K. Hieda, Y. Ishibashi, Y. Kohyama, A. Nitayama (1.Microelectronics Engineering Laboratory, Toshiba Corporation Semiconductor Company)

https://doi.org/10.7567/SSDM.1999.A-15-3