[A-16-2] Ru-Ta2O5MIM Capacitor toward 0.1 μm DRAM Cell

Akihiko Tsuzumitani、Yasutoshi Okuno、Jun Shibata、Tadami Shimizu、Kazuhiko Yamamoto、Yoshihiro Mori (1.ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electronics Corp.)

https://doi.org/10.7567/SSDM.1999.A-16-2