Ru-Ta2O5MIM Capacitor toward 0.1 μm DRAM Cell

Akihiko Tsuzumitani; Yasutoshi Okuno; Jun Shibata; Tadami Shimizu; Kazuhiko Yamamoto; Yoshihiro Mori

doi:https://doi.org/10.7567/SSDM.1999.A-16-2

1999 International Conference on Solid State Devices and Materials

Sep 21, 1999 - Sep 24, 1999
Nihon Toshi Center Kaikan, Tokyo, Japan

[A-16-2] Ru-Ta2O5MIM Capacitor toward 0.1 μm DRAM Cell

Akihiko Tsuzumitani, Yasutoshi Okuno, Jun Shibata, Tadami Shimizu, Kazuhiko Yamamoto, Yoshihiro Mori (1.ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electronics Corp.)

https://doi.org/10.7567/SSDM.1999.A-16-2

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