[A-8-1] Current Status and Future Trend of Analytical Instruments for Failure Analyses in Si Process

Yasuhiro Mitsui, Fumiko Yano, Hiroshi Kakibayashi, Takashi Aoyama (1.Semiconductor & IC Div., Hitachi, Ltd., 2.Central Research Laboratory, Hitachi, Ltd., 3.Hitachi Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1999.A-8-1