Current Status and Future Trend of Analytical Instruments for Failure Analyses in Si Process

Yasuhiro Mitsui; Fumiko Yano; Hiroshi Kakibayashi; Takashi Aoyama

doi:https://doi.org/10.7567/SSDM.1999.A-8-1

[A-8-1] Current Status and Future Trend of Analytical Instruments for Failure Analyses in Si Process

Yasuhiro Mitsui、Fumiko Yano、Hiroshi Kakibayashi、Takashi Aoyama (1.Semiconductor & IC Div., Hitachi, Ltd.、2.Central Research Laboratory, Hitachi, Ltd.、3.Hitachi Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1999.A-8-1

1999 International Conference on Solid State Devices and Materials

[A-8-1] Current Status and Future Trend of Analytical Instruments for Failure Analyses in Si Process