[B-10-4] Heavy Metal(Cu/Fe/Ni) Behavior in Ultra Thin Bonded SOI Wafers Evaluated by Using Radioactive Isotope Tracers

Jun-Ichiro Furihata, Masatake Nakano, Kiyoshi Mitani (1.Thin Film SOI Group. Process Engineering Dept. Isobe R&D Shin-Etsu Handotai Co., Ltd.)

https://doi.org/10.7567/SSDM.1999.B-10-4