[B-13-1] A Novel and Low Thermal Budget Planarization Scheme for Pre-Metal Dielectric Using Electron-Beam Cured HSQ (Hydrogen Silsesquioxane) in STC (Stacked Capacitor) DRAM

Hae-Jeong Lee, Seong-Ho Kim, Juseon Goo, Byeong Jun Kim, Ho-Kyu Kang, Sang-In Lee, Moon Yong Lee (1.Semiconductor R&D Center, Samsung Electronics Co., LTD.)

https://doi.org/10.7567/SSDM.1999.B-13-1