[B-15-3] Dopant-Induced Defects Formed by Ion Implantation -Dopant Species Dependence-
Fuminobu Imaizumi、Tatsufumi Hamada、Kei Kanemoto、Tadahiro Ohmi
(1.Department of Electronic Engineering, Graduate School of Engineering, Tohoku University、2.New Industry Creation Hatchery Center, Tohoku University)
https://doi.org/10.7567/SSDM.1999.B-15-3
