[B-15-3] Dopant-Induced Defects Formed by Ion Implantation -Dopant Species Dependence-

Fuminobu Imaizumi, Tatsufumi Hamada, Kei Kanemoto, Tadahiro Ohmi (1.Department of Electronic Engineering, Graduate School of Engineering, Tohoku University, 2.New Industry Creation Hatchery Center, Tohoku University)

https://doi.org/10.7567/SSDM.1999.B-15-3