The Japan Society of Applied Physics

[B-6-2] Device Performances Improvement Based on TED Suppression in Deep Sub-Quarter Micron Regime

Hyun-Sik Kim, Jong-Hyon Ahn, Duk-Min Lee, Soo-Cheol Lee, Kwang-Pyuk Suh (1.CPU Tech. Team, Samsung Electronics Co, Ltd.)

https://doi.org/10.7567/SSDM.1999.B-6-2