[B-6-2] Device Performances Improvement Based on TED Suppression in Deep Sub-Quarter Micron Regime

Hyun-Sik Kim、Jong-Hyon Ahn、Duk-Min Lee、Soo-Cheol Lee、Kwang-Pyuk Suh (1.CPU Tech. Team, Samsung Electronics Co, Ltd.)

https://doi.org/10.7567/SSDM.1999.B-6-2