Simple Fabrication of Nanopyramid Array (NPA) on Si Surface by Means of Focused Ion Beam Patterning and Wet Etching

M. Koh; T. Shinada; S. Sawara; T. Goto; Y. Ando; I. Ohdomari

doi:https://doi.org/10.7567/SSDM.1999.B-7-2

[B-7-2] Simple Fabrication of Nanopyramid Array (NPA) on Si Surface by Means of Focused Ion Beam Patterning and Wet Etching

M. Koh、T. Shinada、S. Sawara、T. Goto、Y. Ando、I. Ohdomari (1.Kagami Memorial Laboratory for Materials Science and Technology, Waseda University、2.School of Science and Engineering, Waseda University)

https://doi.org/10.7567/SSDM.1999.B-7-2

1999 International Conference on Solid State Devices and Materials

[B-7-2] Simple Fabrication of Nanopyramid Array (NPA) on Si Surface by Means of Focused Ion Beam Patterning and Wet Etching