[D-2-1] Single Electron Memory Devices Based on Silicon Nanocrystals Fabricated by Very High Frequency Plasma Deposition

Amit Dutta, Yoshinori Hayafune, Shigeo Hatatani, Shunri Oda (1.Research Center for Quantum Effect Electronics, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1999.D-2-1