[D-4-2] Single-Electron Transistor and Current-Switching Device Fabricated by Vertical Pattern-Dependent Oxidation (V-PADOX)

Y. Ono、Y. Takahashi、K. Yamazaki、M. Nagase、H. Namatsu、K. Kurihara、K. Murase (1.NTT Basic Research Laboratories)

https://doi.org/10.7567/SSDM.1999.D-4-2