[D-4-2] Single-Electron Transistor and Current-Switching Device Fabricated by Vertical Pattern-Dependent Oxidation (V-PADOX)

Y. Ono, Y. Takahashi, K. Yamazaki, M. Nagase, H. Namatsu, K. Kurihara, K. Murase (1.NTT Basic Research Laboratories)

https://doi.org/10.7567/SSDM.1999.D-4-2