[LB-1-2] New Optimazation Guidelines on Nitrogen Concentration in NO Gate Dielectrics for Advanced Logic and DRAM Application

Jon-Wan Jung、Sung-Kye Park、Gyu-Han Yoon、Dae-Gwan Kang、Young Jong Lee (1.Hyundal Micro Electronics Co., Ltd.)

https://doi.org/10.7567/SSDM.1999.LB-1-2