[LC-1-1] Submicron Ferroelectric Capacitors Fabricated by CMP Process for High-Density FeRAMs

Yasushi Igarashi, Kouichi Tani, Masanori Kasai, Kinya Ashikaga, Toshio Ito (1.Semiconductor Tech. Lab., Oki Electric Industry Co., Ltd.)

https://doi.org/10.7567/SSDM.1999.LC-1-1